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Atsuhiko Suda

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  • Toyama, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of manufacturing semiconductor device
    • Patent number 9,735,068
    • Issue date Aug 15, 2017
    • Hitachi Kokusai Electric Inc.
    • Naofumi Ohashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of manufacturing semiconductor device
    • Patent number 9,666,494
    • Issue date May 30, 2017
    • Hitachi Kokusai Electric, Inc.
    • Atsuhiko Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing system
    • Patent number 9,431,220
    • Issue date Aug 30, 2016
    • Hitachi Kokusai Electric Inc.
    • Naofumi Ohashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus, method of manufacturing semiconduct...
    • Patent number 9,355,866
    • Issue date May 31, 2016
    • Hitachi Kokusai Elecetric, Inc.
    • Atsuhiko Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing system
    • Patent number 8,641,829
    • Issue date Feb 4, 2014
    • Hitachi Kokusai Electric Inc.
    • Tomoki Horita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing system
    • Patent number 8,506,714
    • Issue date Aug 13, 2013
    • Hitachi Kokusai Electric Inc.
    • Tomoki Horita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,240,271
    • Issue date Aug 14, 2012
    • Hitachi Kokusai Electric Inc.
    • Atsuhiko Suda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor device producing method and substrate processing appa...
    • Patent number 7,981,815
    • Issue date Jul 19, 2011
    • Hitachi Kokusai Electric Inc.
    • Hironobu Miya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 6,053,980
    • Issue date Apr 25, 2000
    • Kokusai Electric Co., Ltd.
    • Atsuhiko Suda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 5,772,770
    • Issue date Jun 30, 1998
    • Kokusai Electric Co, Ltd.
    • Atsuhiko Suda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents