Atsuhiko Tabuchi

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Temperature control system, semiconductor manufacturing device, and...
- Patent number 10,553,463
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control system, semiconductor manufacturing device, and...
- Patent number 9,984,908
- Issue date May 29, 2018
- Tokyo Electron Limited
- Atsushi Kobayashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of supplying temperature control fluid to temperature contro...
- Patent number 9,664,460
- Issue date May 30, 2017
- Tokyo Electron Limited
- Atsuhiko Tabuchi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plasma etching apparatus and control method
- Patent number 8,809,197
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Atsuhiko Tabuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20180269090
- Publication date Sep 20, 2018
- TOKYO ELECTRON LIMITED
- Atsushi KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SUPPLYING TEMPERATURE CONTROL FLUID TO TEMPERATURE CONTRO...
- Publication number 20150176928
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Atsuhiko Tabuchi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20140262199
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING APPARATUS AND CONTROL METHOD
- Publication number 20140073066
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Atsuhiko TABUCHI
- H01 - BASIC ELECTRIC ELEMENTS