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Atsuhiro TANI
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Utsunomiya, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Peeling apparatus and manufacturing apparatus of semiconductor device
Patent number
9,570,329
Issue date
Feb 14, 2017
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
9,472,429
Issue date
Oct 18, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Peeling apparatus and manufacturing apparatus of semiconductor device
Patent number
9,397,126
Issue date
Jul 19, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
B32 - LAYERED PRODUCTS
Information
Patent Grant
Peeling apparatus and manufacturing apparatus of semiconductor device
Patent number
9,087,931
Issue date
Jul 21, 2015
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
9,054,141
Issue date
Jun 9, 2015
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Peeling apparatus and manufacturing apparatus of semiconductor device
Patent number
8,889,438
Issue date
Nov 18, 2014
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
B32 - LAYERED PRODUCTS
Information
Patent Grant
Peeling apparatus and manufacturing apparatus of semiconductor device
Patent number
8,137,417
Issue date
Mar 20, 2012
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
B32 - LAYERED PRODUCTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,048,777
Issue date
Nov 1, 2011
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,048,770
Issue date
Nov 1, 2011
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,043,936
Issue date
Oct 25, 2011
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PEELING APPARATUS AND MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
Publication number
20170154902
Publication date
Jun 1, 2017
Semiconductor Energy Laboratory Co., Ltd.
Shingo EGUCHI
B32 - LAYERED PRODUCTS
Information
Patent Application
PEELING APPARATUS AND MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
Publication number
20160314999
Publication date
Oct 27, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shingo EGUCHI
B32 - LAYERED PRODUCTS
Information
Patent Application
PEELING APPARATUS AND MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
Publication number
20160013221
Publication date
Jan 14, 2016
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEELING APPARATUS AND MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
Publication number
20150140713
Publication date
May 21, 2015
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20150017751
Publication date
Jan 15, 2015
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEELING APPARATUS AND MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
Publication number
20120168066
Publication date
Jul 5, 2012
Semiconductor Energy Laboratory Co., Ltd.
Shingo EGUCHI
B32 - LAYERED PRODUCTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20120045861
Publication date
Feb 23, 2012
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20090023251
Publication date
Jan 22, 2009
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20090017599
Publication date
Jan 15, 2009
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20090017567
Publication date
Jan 15, 2009
Semiconductor Energy Laboratory Co., Ltd.
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20080132033
Publication date
Jun 5, 2008
Shingo Eguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Peeling apparatus and manufacturing apparatus of semiconductor device
Publication number
20080113486
Publication date
May 15, 2008
Shingo Eguchi
B32 - LAYERED PRODUCTS