Atsuko Fujino

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of patterning a mask blank
- Patent number 6,984,473
- Issue date Jan 10, 2006
- Mitsubishi Denki Kabushiki Kaisha
- Teruhiko Kumada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing process, process for forming pattern and process for pre...
- Patent number 6,511,792
- Issue date Jan 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Atsuko Fujino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Mask blank, protective film therefor and method of patterning mask...
- Publication number 20030152845
- Publication date Aug 14, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Teruhiko Kumada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, exposure apparatus, X-ray mask, semiconductor devi...
- Publication number 20020196896
- Publication date Dec 26, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Toyoki Kitayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing process, process for forming pattern and process for pre...
- Publication number 20010018166
- Publication date Aug 30, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Atsuko Fujino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY