Membership
Tour
Register
Log in
Atsuko Fujino
Follow
Person
Tokyo, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of patterning a mask blank
Patent number
6,984,473
Issue date
Jan 10, 2006
Mitsubishi Denki Kabushiki Kaisha
Teruhiko Kumada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing process, process for forming pattern and process for pre...
Patent number
6,511,792
Issue date
Jan 28, 2003
Mitsubishi Denki Kabushiki Kaisha
Atsuko Fujino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Mask blank, protective film therefor and method of patterning mask...
Publication number
20030152845
Publication date
Aug 14, 2003
Mitsubishi Denki Kabushiki Kaisha
Teruhiko Kumada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method, exposure apparatus, X-ray mask, semiconductor devi...
Publication number
20020196896
Publication date
Dec 26, 2002
Mitsubishi Denki Kabushiki Kaisha
Toyoki Kitayama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing process, process for forming pattern and process for pre...
Publication number
20010018166
Publication date
Aug 30, 2001
Mitsubishi Denki Kabushiki Kaisha
Atsuko Fujino
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY