Atsuko Fukada

Person

Kokubunji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,431,893
- Issue date Apr 30, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,207,498
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 8,153,969
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle apparatus, scanning electron microscope, and sampl...
- Patent number 8,026,481
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 7,875,849
- Issue date Jan 25, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,847,249
- Issue date Dec 7, 2010
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and apparatus for detecting defect
- Patent number 7,504,626
- Issue date Mar 17, 2009
- Hitachi High-Technologies Corporation
- Ichiro Tachibana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 7,462,828
- Issue date Dec 9, 2008
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus using charged particle beam
- Patent number 7,449,690
- Issue date Nov 11, 2008
- Hitachi High-Technologies Corporation
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron Beam Apparatus and Electron Beam Inspection Method
- Publication number 20120261574
- Publication date Oct 18, 2012
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...
- Publication number 20120004879
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Apparatus And Electron Beam Inspection Method
- Publication number 20110101223
- Publication date May 5, 2011
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
- Publication number 20090184255
- Publication date Jul 23, 2009
- Hitachi High-Technologies Corporation
- Atsuko FUKADA
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080185519
- Publication date Aug 7, 2008
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Apparatus and Electron Beam Inspection Method
- Publication number 20080099673
- Publication date May 1, 2008
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning electron microscope and apparatus for detecting defect
- Publication number 20070187598
- Publication date Aug 16, 2007
- Ichiro Tachibana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle apparatus, scanning electron microscope, and sampl...
- Publication number 20070181807
- Publication date Aug 9, 2007
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and inspection system using charged particle beam
- Publication number 20060243906
- Publication date Nov 2, 2006
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and inspection apparatus using charged particle beam
- Publication number 20060186351
- Publication date Aug 24, 2006
- Hidetoshi Nishiyama
- H01 - BASIC ELECTRIC ELEMENTS

Atsuko Fukada

Person

Patents Grantslast 30 patents

Electron beam apparatus and electron beam inspection method

Electron beam apparatus and electron beam inspection method

Inspection method and inspection system using charged particle beam

Charged particle apparatus, scanning electron microscope, and sampl...

Electron beam apparatus and electron beam inspection method

Charged particle beam apparatus

Scanning electron microscope and apparatus for detecting defect

Inspection method and inspection system using charged particle beam

Inspection method and inspection apparatus using charged particle beam

Patents Applicationslast 30 patents

Electron Beam Apparatus and Electron Beam Inspection Method

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...

Electron Beam Apparatus And Electron Beam Inspection Method

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

Charged particle beam apparatus

Electron Beam Apparatus and Electron Beam Inspection Method

Scanning electron microscope and apparatus for detecting defect

Charged particle apparatus, scanning electron microscope, and sampl...

Inspection method and inspection system using charged particle beam

Inspection method and inspection apparatus using charged particle beam