Atsuko Kubota

Follow

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor silicon wafer and process for producing it
- Patent number 5,738,942
- Issue date Apr 14, 1998
- Kabushiki Kaisha Toshiba
- Atsuko Kubota
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for producing Semiconductor silicon wafer
- Patent number 5,534,294
- Issue date Jul 9, 1996
- Kabushiki Kaisha Toshiba
- Atsuko Kubota
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor substrate, method of manufacturing semiconductor subs...
- Patent number 5,508,800
- Issue date Apr 16, 1996
- Kabushiki Kaisha Toshiba
- Moriya Miyashita
- G01 - MEASURING TESTING
Information Patent Grant
System for analyzing metal impurity on the surface of a single crys...
- Patent number 5,148,457
- Issue date Sep 15, 1992
- Kabushiki Kaisha Toshiba
- Atsuko Kubota
- G01 - MEASURING TESTING
Information Patent Grant
Wafer processsing method for manufacturing wafers having contaminan...
- Patent number 5,071,776
- Issue date Dec 10, 1991
- Kabushiki Kaisha Toshiba
- Yoshiaki Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for predicting density of micro crystal defects in semicondu...
- Patent number 4,862,000
- Issue date Aug 29, 1989
- Kabushiki Kaisha Toshiba
- Atsuko Kubota
- G01 - MEASURING TESTING