Membership
Tour
Register
Log in
Atsuko Yamaguchi
Follow
Person
Kodaira, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Image analysis apparatus and charged particle beam apparatus
Patent number
10,724,856
Issue date
Jul 28, 2020
HITACHI HIGH-TECH CORPORATION
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection device
Patent number
10,672,119
Issue date
Jun 2, 2020
HITACHI HIGH-TECH CORPORATION
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam device and inspection device
Patent number
9,824,938
Issue date
Nov 21, 2017
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for line pattern shape evaluation
Patent number
9,658,063
Issue date
May 23, 2017
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image processing apparatus
Patent number
9,183,622
Issue date
Nov 10, 2015
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor inspection device and semiconductor inspection method...
Patent number
9,123,504
Issue date
Sep 1, 2015
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for measuring displacement between patterns an...
Patent number
9,000,366
Issue date
Apr 7, 2015
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for evaluating degradation of pattern features
Patent number
8,401,273
Issue date
Mar 19, 2013
Hitachi, Ltd.
Yoshinori Momonoi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Length measurement system
Patent number
8,369,602
Issue date
Feb 5, 2013
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus for data analysis
Patent number
8,300,919
Issue date
Oct 30, 2012
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Evaluation method of fine pattern feature, its equipment, and metho...
Patent number
7,684,937
Issue date
Mar 23, 2010
Hitachi, Ltd.
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
High-accuracy pattern shape evaluating method and apparatus
Patent number
7,619,751
Issue date
Nov 17, 2009
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
High-accuracy pattern shape evaluating method and apparatus
Patent number
7,405,835
Issue date
Jul 29, 2008
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for circuit pattern inspection
Patent number
7,369,703
Issue date
May 6, 2008
Hitachi, Ltd.
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Evaluation method of fine pattern feature, its equipment, and metho...
Patent number
7,366,620
Issue date
Apr 29, 2008
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
High-accuracy pattern shape evaluating method and apparatus
Patent number
7,230,723
Issue date
Jun 12, 2007
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for circuit pattern inspection
Patent number
7,095,884
Issue date
Aug 22, 2006
Hitachi, Ltd.
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection method
Patent number
7,049,589
Issue date
May 23, 2006
Hitachi, Ltd.
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Grant
Document retrieval assisting method and system for the same and doc...
Patent number
6,745,183
Issue date
Jun 1, 2004
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Computer program embodied on a computer-readable medium for a docum...
Patent number
6,654,738
Issue date
Nov 25, 2003
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Document retrieval assisting method, system and service using close...
Patent number
6,457,004
Issue date
Sep 24, 2002
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Document retrieval assisting method and system for the same and doc...
Patent number
6,446,065
Issue date
Sep 3, 2002
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
IMAGE ANALYSIS APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20190204247
Publication date
Jul 4, 2019
Hitachi High-Technologies Corporation
Atsuko YAMAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION DEVICE
Publication number
20180308228
Publication date
Oct 25, 2018
Hitachi High-Technologies Corporation
Atsuko YAMAGUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE
Publication number
20170040230
Publication date
Feb 9, 2017
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR LINE PATTERN SHAPE EVALUATION
Publication number
20160123726
Publication date
May 5, 2016
Hitachi High-Technologies Corporation
Atsuko YAMAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
IMAGE PROCESSING APPARATUS AND COMPUTER PROGRAM
Publication number
20130279793
Publication date
Oct 24, 2013
Hitachi High-Technologies Corporation
Yasutaka Toyoda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...
Publication number
20130264479
Publication date
Oct 10, 2013
Atsuko YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD...
Publication number
20120098954
Publication date
Apr 26, 2012
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS FOR EVALUATING DEGRADATION OF PATTERN FEATURES
Publication number
20110176718
Publication date
Jul 21, 2011
Hitachi, Ltd
Yoshinori MOMONOI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS FOR DATA ANALYSIS
Publication number
20090263024
Publication date
Oct 22, 2009
Hitachi High-Technologies Corporation
Atsuko YAMAGUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LENGTH MEASUREMENT SYSTEM
Publication number
20090046896
Publication date
Feb 19, 2009
Atsuko YAMAGUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS
Publication number
20080226177
Publication date
Sep 18, 2008
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Evaluation method of fine pattern feature, its equipment, and metho...
Publication number
20080215274
Publication date
Sep 4, 2008
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
High-accuracy pattern shape evaluating method and apparatus
Publication number
20070242885
Publication date
Oct 18, 2007
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for circuit pattern inspection
Publication number
20060269121
Publication date
Nov 30, 2006
Atsuko Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
High-accuracy pattern shape evaluating method and apparatus
Publication number
20060145076
Publication date
Jul 6, 2006
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Evaluation method of fine pattern feature, its equipment, and metho...
Publication number
20060036409
Publication date
Feb 16, 2006
Hitachi High-Technologies Corporation
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Pattern inspection method
Publication number
20040195507
Publication date
Oct 7, 2004
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for circuit pattern inspection
Publication number
20030021463
Publication date
Jan 30, 2003
Atsuko Yamaguchi
G01 - MEASURING TESTING
Information
Patent Application
Document retrieval assisting method and system for the same and doc...
Publication number
20020178153
Publication date
Nov 28, 2002
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Document retrieval assisting method and system for the same and doc...
Publication number
20020042792
Publication date
Apr 11, 2002
Hitachi, Ltd.
Shingo Nishioka
G06 - COMPUTING CALCULATING COUNTING