TREA

Atsumi Ito

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  • Shikishima-cho, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer boat and film formation method
    • Patent number 6,344,387
    • Issue date Feb 5, 2002
    • Tokyo Electron Limited
    • Kazuhide Hasebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer boat and film formation method
    • Patent number 6,156,121
    • Issue date Dec 5, 2000
    • Tokyo Electron Limited
    • Kazuhide Hasebe
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...