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Atsunobu Isobayashi
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Clifton Park, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Restoration method using metal for better CD controllability and Cu...
Patent number
8,168,528
Issue date
May 1, 2012
Kabushiki Kaisha Toshiba
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing semiconductor structure and device based on t...
Patent number
8,138,097
Issue date
Mar 20, 2012
Kabushiki Kaisha Toshiba
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Application of Mn for damage restoration after etchback
Patent number
8,134,234
Issue date
Mar 13, 2012
Kabushiki Kaisha Toshiba
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PROCESSING SEMICONDUCTOR STRUCTURE AND DEVICE BASED ON T...
Publication number
20120068347
Publication date
Mar 22, 2012
Toshiba America Electronic Components, Inc
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING INTERCONNECTION LINE AND SEMICONDUCTOR STRUCTURE
Publication number
20110266676
Publication date
Nov 3, 2011
Toshiba America Electronic Components, Inc
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPLICATION OF MN FOR DAMAGE RESTORATION AFTER ETCHBACK
Publication number
20100320604
Publication date
Dec 23, 2010
Toshiba America Electronic Components, Inc
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESTORATION METHOD USING METAL FOR BETTER CD CONTROLLABILITY AND CU...
Publication number
20100323514
Publication date
Dec 23, 2010
Toshiba America Electronic Components, Inc
Atsunobu Isobayashi
H01 - BASIC ELECTRIC ELEMENTS