Atsunobu Ohkura

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Yachimata, JP

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Patents Grantslast 30 patents

Information Patent Grant
Resistance heated stem mounted aluminum susceptor assembly
- Patent number 5,688,331
- Issue date Nov 18, 1997
- Applied Materisls, Inc.
- Michio Aruga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...