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Atsuo Katagiri
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for processing substrate and substrate processing apparatus
Patent number
11,069,563
Issue date
Jul 20, 2021
EBARA CORPORATION
Atsuo Katagiri
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR FABRICATING CATALYST...
Publication number
20210265176
Publication date
Aug 26, 2021
EBARA CORPORATION
Atsuo Katagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
Publication number
20210187685
Publication date
Jun 24, 2021
EBARA CORPORATION
Atsuo Katagiri
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR PROCESSING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
Publication number
20200294847
Publication date
Sep 17, 2020
EBARA CORPORATION
Atsuo Katagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDE...
Publication number
20200194285
Publication date
Jun 18, 2020
EBARA CORPORATION
Atsuo Katagiri
H01 - BASIC ELECTRIC ELEMENTS