Atsuo Sanda

Follow

Person

Oita-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 7,201,851
- Issue date Apr 10, 2007
- Tokyo Electron Limited
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and substrate transfer method
- Patent number 6,990,747
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for performing plain etching treatment
- Patent number 5,837,093
- Issue date Nov 17, 1998
- Kabushiki Kaisha Toshiba
- Makoto Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing apparatus, method for removing r...
- Patent number 5,795,399
- Issue date Aug 18, 1998
- Kabushiki Kaisha Toshiba
- Makoto Hasegawa
- B08 - CLEANING
Information Patent Grant
Method of performing plain etching treatment and apparatus therefor
- Patent number 5,415,728
- Issue date May 16, 1995
- Kabushiki Kaisha Toshiba
- Makoto Hasegawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Vacuum processing apparatus and substrate transfer method
- Publication number 20060032074
- Publication date Feb 16, 2006
- TOKYO ELECTRON LIMITED
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum processing apparatus and substrate transfer method
- Publication number 20040255485
- Publication date Dec 23, 2004
- TOKYO ELECTRON LIMITED
- Toshihiko Kitoku
- H01 - BASIC ELECTRIC ELEMENTS