Atsuro Eitoku

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,910,213
- Issue date Feb 2, 2021
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,843,223
- Issue date Nov 24, 2020
- SCREEN Holdings Co., Ltd.
- Takayoshi Tanaka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 10,720,320
- Issue date Jul 21, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,224,198
- Issue date Mar 5, 2019
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,118,945
- Issue date Feb 21, 2012
- Dainippon Screen Mfg. Co., Ltd.
- Atsuro Eitoku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 7,494,549
- Issue date Feb 24, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Atsuro Eitoku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and apparatus for processing substrate
- Patent number 6,273,104
- Issue date Aug 14, 2001
- Dainippon Screen Mfg. Co., Ltd.
- Kaoru Shinbara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 5,943,726
- Issue date Aug 31, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Atsuro Eitoku
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190148134
- Publication date May 16, 2019
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180345315
- Publication date Dec 6, 2018
- SCREEN Holdings Co., Ltd.
- Takayoshi TANAKA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180269056
- Publication date Sep 20, 2018
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170182515
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Substrate treatment apparatus and substrate treatment method
- Publication number 20040031503
- Publication date Feb 19, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Atsuro Eitoku
- B08 - CLEANING

Atsuro Eitoku

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing device

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Substrate treatment apparatus and substrate treatment method

Method of and apparatus for processing substrate

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate treatment apparatus and substrate treatment method