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Atsushi Endoh
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Reaction tube and heat processing apparatus for a semiconductor pro...
Patent number
8,216,378
Issue date
Jul 10, 2012
Tokyo Electron Limited
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming silicon oxide film
Patent number
7,220,461
Issue date
May 22, 2007
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
REACTION TUBE AND HEAT PROCESSING APPARATUS FOR A SEMICONDUCTOR PRO...
Publication number
20090250005
Publication date
Oct 8, 2009
TOKYO ELECTRON LIMITED
Hirofumi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for forming silicon oxide film
Publication number
20050196533
Publication date
Sep 8, 2005
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...