Atsushi Fukushima

Follow

Person

Kitaibaraki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing member for thin-film formation apparatus an...
- Patent number 6,319,419
- Issue date Nov 20, 2001
- Japan Energy Corporation
- Tateo Ohhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing member for thin-film formation apparatus an...
- Patent number 6,045,665
- Issue date Apr 4, 2000
- Japan Energy Corporation
- Tateo Ohhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target assembly having solid-phase bonded interface
- Patent number 5,693,203
- Issue date Dec 2, 1997
- Japan Energy Corporation
- Tateo Ohhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...