Atsushi Hidaka

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Casing for fluid controller and fluid controller provided with same
- Patent number 12,203,558
- Issue date Jan 21, 2025
- Fujikin Incorporated
- Atsushi Hidaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Driving device provided with piezoelectric element deterioration de...
- Patent number 11,994,482
- Issue date May 28, 2024
- Fujikin Incorporated
- Atsushi Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Abnormality detection method for flow rate control device, and flow...
- Patent number 11,988,543
- Issue date May 21, 2024
- Fujikin Incorporated
- Atsushi Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Diaphragm valve
- Patent number 11,976,748
- Issue date May 7, 2024
- Fujikin Incorporated
- Kaoru Hirata
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Vaporized feed device
- Patent number 11,976,356
- Issue date May 7, 2024
- Fujikin Incorporated
- Takatoshi Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diaphragm type pressure sensor arrangement having corrosion resista...
- Patent number 11,768,123
- Issue date Sep 26, 2023
- Fujikin Incorporated
- Atsushi Hidaka
- G01 - MEASURING TESTING
Information Patent Grant
Liquid level meter, vaporizer equipped with the same, and liquid le...
- Patent number 11,402,250
- Issue date Aug 2, 2022
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid control device
- Patent number 11,390,951
- Issue date Jul 19, 2022
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization supply apparatus
- Patent number 10,646,844
- Issue date May 12, 2020
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid level indicator and liquid raw material vaporization feeder
- Patent number 10,604,840
- Issue date Mar 31, 2020
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid level detection circuit, liquid level meter, container provi...
- Patent number 10,274,356
- Issue date Apr 30, 2019
- Fujikin Incorporated
- Kaoru Hirata
- G01 - MEASURING TESTING
Information Patent Grant
Flow meter and flow control device provided therewith
- Patent number 10,073,469
- Issue date Sep 11, 2018
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Raw material vaporization and supply apparatus
- Patent number 9,994,955
- Issue date Jun 12, 2018
- FUJIKIN INCORPORATED
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control device equipped with flow monitor
- Patent number 9,791,867
- Issue date Oct 17, 2017
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multi-hole orifice plate for flow control, and flow controller usin...
- Patent number 9,746,856
- Issue date Aug 29, 2017
- Fujikin Incorporated
- Kaoru Hirata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Flow control system with build-down system flow monitoring
- Patent number 9,733,649
- Issue date Aug 15, 2017
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Pressure type flow rate control device
- Patent number 9,574,917
- Issue date Feb 21, 2017
- Fujikin Incorporated
- Atsushi Hidaka
- G05 - CONTROLLING REGULATING
Information Patent Grant
Raw material gas supply apparatus for semiconductor manufacturing e...
- Patent number 9,556,518
- Issue date Jan 31, 2017
- Fujikin Incorporated
- Masaaki Nagase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piezoelectrically driven valve and piezoelectrically driven flow ra...
- Patent number 9,163,743
- Issue date Oct 20, 2015
- Fujikin Incorporated
- Atsushi Hidaka
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas supply apparatus equipped with vaporizer
- Patent number 8,931,506
- Issue date Jan 13, 2015
- Fujikin Incorporated
- Atsushi Nagata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer
- Patent number 8,724,974
- Issue date May 13, 2014
- Fujikin Incorporated
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation supply apparatus for raw material and automatic pressur...
- Patent number 8,047,510
- Issue date Nov 1, 2011
- Fujikin Incorporated
- Kaoru Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONTROLLER AND VAPORIZATION SUPPLY DEVICE
- Publication number 20240167577
- Publication date May 23, 2024
- Fujikin Incorporated
- Atsushi HIDAKA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PRESSURE SENSOR
- Publication number 20240094078
- Publication date Mar 21, 2024
- Fujikin Incorporated
- Atsushi HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
CASING FOR FLUID CONTROLLER AND FLUID CONTROLLER PROVIDED WITH SAME
- Publication number 20230400114
- Publication date Dec 14, 2023
- Fujikin Incorporated
- Atsushi HIDAKA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD
- Publication number 20230324008
- Publication date Oct 12, 2023
- Fujikin Incorporated
- Takatoshi NAKATANI
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
COVER COMPONENT FOR PRESSURE SENSOR, AND PRESSURE SENSOR DEVICE COM...
- Publication number 20230296464
- Publication date Sep 21, 2023
- Fujikin Incorporated
- Atsushi HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
DRIVING DEVICE PROVIDED WITH PIEZOELECTRIC ELEMENT DETERIORATION DE...
- Publication number 20230152263
- Publication date May 18, 2023
- Fujikin Incorporated
- Atsushi HIDAKA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL...
- Publication number 20230121563
- Publication date Apr 20, 2023
- Fujikin Incorporated
- Takatoshi NAKATANI
- G01 - MEASURING TESTING
Information Patent Application
VAPORIZATION SUPPLY METHOD AND VAPORIZATION SUPPLY DEVICE
- Publication number 20230002900
- Publication date Jan 5, 2023
- Fujikin Incorporated
- Atsushi HIDAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZED FEED DEVICE
- Publication number 20220403508
- Publication date Dec 22, 2022
- Fujikin Incorporated
- Takatoshi NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ABNORMALITY DETECTION METHOD FOR FLOW RATE CONTROL DEVICE, AND FLOW...
- Publication number 20220390269
- Publication date Dec 8, 2022
- Fujikin Incorporated
- Atsushi HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
DIAPHRAGM VALVE
- Publication number 20220268365
- Publication date Aug 25, 2022
- Fujikin Incorporated
- Kaoru HIRATA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PRESSURE SENSOR
- Publication number 20210356346
- Publication date Nov 18, 2021
- Fujikin Incorporated
- Atsushi HIDAKA
- G01 - MEASURING TESTING
Information Patent Application
FLUID CONTROL DEVICE
- Publication number 20200199753
- Publication date Jun 25, 2020
- Fujikin Incorporated
- Atsushi HIDAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID CONTROL DEVICE
- Publication number 20200149162
- Publication date May 14, 2020
- Fujikin Incorporated
- Atsushi HIDAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID LEVEL METER, VAPORIZER EQUIPPED WITH THE SAME, AND LIQUID LE...
- Publication number 20200088561
- Publication date Mar 19, 2020
- Fujikin Incorporated
- Atsushi HIDAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZATION SUPPLY APPARATUS
- Publication number 20180071702
- Publication date Mar 15, 2018
- Fujikin Incorporated
- Atsushi HIDAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW CONTROL SYSTEM WITH BUILD-DOWN SYSTEM FLOW MONITORING
- Publication number 20170364099
- Publication date Dec 21, 2017
- Fujikin Incorporated
- Masaaki Nagase
- G01 - MEASURING TESTING
Information Patent Application
LIQUID LEVEL INDICATOR AND LIQUID RAW MATERIAL VAPORIZATION FEEDER
- Publication number 20170327949
- Publication date Nov 16, 2017
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID LEVEL DETECTION CIRCUIT, LIQUID LEVEL METER, CONTAINER PROVI...
- Publication number 20170268919
- Publication date Sep 21, 2017
- Fujikin Incorporated
- Kaoru HIRATA
- G01 - MEASURING TESTING
Information Patent Application
FLOW CONTROL DEVICE EQUIPPED WITH FLOW MONITOR
- Publication number 20160282880
- Publication date Sep 29, 2016
- Fujikin Incorporated
- Masaaki NAGASE
- G01 - MEASURING TESTING
Information Patent Application
FLOW METER AND FLOW CONTROL DEVICE PROVIDED THEREWITH
- Publication number 20160239026
- Publication date Aug 18, 2016
- Fujikin Incorporated
- Masaaki NAGASE
- G01 - MEASURING TESTING
Information Patent Application
MULTI-HOLE ORIFICE PLATE FOR FLOW CONTROL, AND FLOW CONTROLLER USIN...
- Publication number 20160070271
- Publication date Mar 10, 2016
- Fujikin Incorporated
- Kaoru HIRATA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
RAW MATERIAL VAPORIZATION AND SUPPLY APPARATUS
- Publication number 20150322567
- Publication date Nov 12, 2015
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW CONTROL SYSTEM WITH BUILD-DOWN SYSTEM FLOW MONITORING
- Publication number 20150136248
- Publication date May 21, 2015
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Application
RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS
- Publication number 20140216339
- Publication date Aug 7, 2014
- Fujikin Incorporated
- Masaaki Nagase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY APPARATUS FOR SEMICONDUCTOR MANUFACTURING E...
- Publication number 20140190581
- Publication date Jul 10, 2014
- Fujikin Incorporated
- Masaaki Nagase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS
- Publication number 20140124064
- Publication date May 8, 2014
- Fujikin Incorporated
- Atsushi Hidaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER
- Publication number 20130084059
- Publication date Apr 4, 2013
- Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE TYPE FLOW RATE CONTROL DEVICE
- Publication number 20120298220
- Publication date Nov 29, 2012
- Fujikin Incorporated
- Atsushi HIDAKA
- G05 - CONTROLLING REGULATING
Information Patent Application
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Ra...
- Publication number 20120273061
- Publication date Nov 1, 2012
- Fujikin Incorporated
- Atsushi Hidaka
- G05 - CONTROLLING REGULATING

Atsushi Hidaka

Person

Patents Grantslast 30 patents

Casing for fluid controller and fluid controller provided with same

Driving device provided with piezoelectric element deterioration de...

Abnormality detection method for flow rate control device, and flow...

Diaphragm valve

Vaporized feed device

Diaphragm type pressure sensor arrangement having corrosion resista...

Liquid level meter, vaporizer equipped with the same, and liquid le...

Fluid control device

Vaporization supply apparatus

Liquid level indicator and liquid raw material vaporization feeder

Liquid level detection circuit, liquid level meter, container provi...

Flow meter and flow control device provided therewith

Raw material vaporization and supply apparatus

Flow control device equipped with flow monitor

Multi-hole orifice plate for flow control, and flow controller usin...

Flow control system with build-down system flow monitoring

Pressure type flow rate control device

Raw material gas supply apparatus for semiconductor manufacturing e...

Piezoelectrically driven valve and piezoelectrically driven flow ra...

Gas supply apparatus equipped with vaporizer

Vaporizer

Evaporation supply apparatus for raw material and automatic pressur...

Patents Applicationslast 30 patents

CONTROLLER AND VAPORIZATION SUPPLY DEVICE

PRESSURE SENSOR

CASING FOR FLUID CONTROLLER AND FLUID CONTROLLER PROVIDED WITH SAME

GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD

COVER COMPONENT FOR PRESSURE SENSOR, AND PRESSURE SENSOR DEVICE COM...

DRIVING DEVICE PROVIDED WITH PIEZOELECTRIC ELEMENT DETERIORATION DE...

GAS SUPPLY AMOUNT MEASUREMENT METHOD AND GAS SUPPLY AMOUNT CONTROL...

VAPORIZATION SUPPLY METHOD AND VAPORIZATION SUPPLY DEVICE

VAPORIZED FEED DEVICE

ABNORMALITY DETECTION METHOD FOR FLOW RATE CONTROL DEVICE, AND FLOW...

DIAPHRAGM VALVE

PRESSURE SENSOR

FLUID CONTROL DEVICE

FLUID CONTROL DEVICE

LIQUID LEVEL METER, VAPORIZER EQUIPPED WITH THE SAME, AND LIQUID LE...

VAPORIZATION SUPPLY APPARATUS

FLOW CONTROL SYSTEM WITH BUILD-DOWN SYSTEM FLOW MONITORING

LIQUID LEVEL INDICATOR AND LIQUID RAW MATERIAL VAPORIZATION FEEDER

LIQUID LEVEL DETECTION CIRCUIT, LIQUID LEVEL METER, CONTAINER PROVI...

FLOW CONTROL DEVICE EQUIPPED WITH FLOW MONITOR

FLOW METER AND FLOW CONTROL DEVICE PROVIDED THEREWITH

MULTI-HOLE ORIFICE PLATE FOR FLOW CONTROL, AND FLOW CONTROLLER USIN...

RAW MATERIAL VAPORIZATION AND SUPPLY APPARATUS

FLOW CONTROL SYSTEM WITH BUILD-DOWN SYSTEM FLOW MONITORING

RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS

RAW MATERIAL GAS SUPPLY APPARATUS FOR SEMICONDUCTOR MANUFACTURING E...

RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS

VAPORIZER

PRESSURE TYPE FLOW RATE CONTROL DEVICE

Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Ra...