Atsushi HIRANO

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,594,412
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube structure and substrate processing apparatus
- Patent number 11,359,283
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Tetsuya Marubayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 11,299,804
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,041,240
- Issue date Jun 22, 2021
- Hitachi Kokusai Electric, Inc.
- Kosuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
- Patent number 11,031,270
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Atsushi Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, vaporization system and mist filter
- Patent number 10,767,260
- Issue date Sep 8, 2020
- Kokusai Electric Corporation
- Kosuke Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,708,708
- Issue date Jul 18, 2017
- Hitachi Kokusai Electric, Inc.
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240141490
- Publication date May 2, 2024
- Kokusai Electric Corporation
- Mika Urushihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...
- Publication number 20230253222
- Publication date Aug 10, 2023
- Kokusai Electric Corporation
- Kenta Kasamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230207335
- Publication date Jun 29, 2023
- Kokusai Electric Corporation
- Makoto Sambu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230170212
- Publication date Jun 1, 2023
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...
- Publication number 20230116953
- Publication date Apr 20, 2023
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230020001
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFAC...
- Publication number 20220307137
- Publication date Sep 29, 2022
- Kokusai Electric Corporation
- Kenta KASAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, METHOD OF MANUFACTUR...
- Publication number 20220301865
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210348275
- Publication date Nov 11, 2021
- Kokusai Electric Corporation
- Tomoyuki KURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210292892
- Publication date Sep 23, 2021
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200312631
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Tetsuya MARUBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200312655
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Keigo NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
- Publication number 20200095676
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093224
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Ryosuke YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER
- Publication number 20190024232
- Publication date Jan 24, 2019
- Hitachi Kokusai Electric Inc.
- Tetsuya KOSUGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL
- Publication number 20180374734
- Publication date Dec 27, 2018
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, VAPORIZATION SYSTEM AND MIST FILTER
- Publication number 20180274093
- Publication date Sep 27, 2018
- Hitachi Kokusai Electric Inc.
- Kosuke Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180274098
- Publication date Sep 27, 2018
- Hitachi Kokusai Electric Inc.
- Kosuke TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180142353
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya MARUBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170067159
- Publication date Mar 9, 2017
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atsushi HIRANO

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Reaction tube structure and substrate processing apparatus

Method of manufacturing semiconductor device, non-transitory comput...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, substrate holder and mounting tool

Substrate processing apparatus, vaporization system and mist filter

Method of manufacturing semiconductor device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

REACTION TUBE, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS, REACTION TUBE, METHOD OF MANUFACTUR...

GAS SUPPLY STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

REACTION TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Method of Manufacturing Semiconductor Device, Non-transitory Comput...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL

SUBSTRATE PROCESSING APPARATUS, VAPORIZATION SYSTEM AND MIST FILTER

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS

Method of Manufacturing Semiconductor Device