Atsushi Ito

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120216955
- Publication date Aug 30, 2012
- TOSHIBA MATERIALS CO., LTD.
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS FLOW CONTROL SYSTEM, PLASMA PROCESSING APPARATUS, AND FLOW CON...
- Publication number 20120000607
- Publication date Jan 5, 2012
- Kabushiki Kaisha Toshiba
- Atsushi Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...