Membership
Tour
Register
Log in
Atsushi Ito
Follow
Person
Yamanashi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing device and baffle plate thereof
Patent number
7,109,660
Issue date
Sep 19, 2006
Tokyo Electron Limited
Hiroyuki Ishihara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma processing device and baffle plate thereof
Publication number
20050167052
Publication date
Aug 4, 2005
TOKYO ELECTRON LIMITED
Hiroyuki Ishihara
H01 - BASIC ELECTRIC ELEMENTS