Membership
Tour
Register
Log in
Atsushi Kawabata
Follow
Person
Nirasaki-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Structure for automatic in-situ replacement of a part of an electro...
Patent number
11,380,573
Issue date
Jul 5, 2022
Tokyo Electron Limited
Daisuke Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
De-chuck control method and control device for plasma processing ap...
Patent number
9,466,519
Issue date
Oct 11, 2016
Tokyo Electron Limited
Atsushi Kawabata
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Plasma etching method
Patent number
7,488,689
Issue date
Feb 10, 2009
Tokyo Electron Limited
Shinya Morikita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method and apparatus, computer program and computer readabl...
Patent number
7,387,743
Issue date
Jun 17, 2008
Tokyo Electron Limited
Shinya Morikita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
Publication number
20240162075
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Akira NAGAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSI...
Publication number
20230136720
Publication date
May 4, 2023
TOKYO ELECTRON LIMITED
Atsushi KAWABATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK, SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS...
Publication number
20230064309
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Masanori SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE FOR AUTOMATIC IN-SITU REPLACEMENT OF A PART OF AN ELECTRO...
Publication number
20210384060
Publication date
Dec 9, 2021
TOKYO ELECTRON LIMITED
Daisuke HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DE-CHUCK CONTROL METHOD AND CONTROL DEVICE FOR PLASMA PROCESSING AP...
Publication number
20150303092
Publication date
Oct 22, 2015
TOKYO ELECTRON LIMITED
Atsushi Kawabata
G01 - MEASURING TESTING
Information
Patent Application
Etching method and apparatus, computer program and computer readabl...
Publication number
20060219657
Publication date
Oct 5, 2006
TOKYO ELECTRON LIMITED
Shinya Morikita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma etching method
Publication number
20060118520
Publication date
Jun 8, 2006
TOKYO ELECTRON LIMITED
Shinya Morikita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...