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Atsushi Kawabe

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing device
    • Patent number 11,527,426
    • Issue date Dec 13, 2022
    • Tokyo Electron Limited
    • Norihiko Tsuji
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transfer method and substrate transfer apparatus
    • Patent number 11,127,614
    • Issue date Sep 21, 2021
    • Tokyo Electron Limited
    • Atsushi Kawabe
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Processing system
    • Patent number 10,896,835
    • Issue date Jan 19, 2021
    • Tokyo Electron Limited
    • Atsushi Kawabe
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents