Atsushi Kawahara

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Holding device, holding method, lithography apparatus, and article...
- Patent number 10,067,427
- Issue date Sep 4, 2018
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,575,413
- Issue date Feb 21, 2017
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Foreign substance inspection apparatus, exposure apparatus, and met...
- Patent number 8,330,949
- Issue date Dec 11, 2012
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G01 - MEASURING TESTING
Information Patent Grant
Particle inspection apparatus, exposure apparatus, and device manuf...
- Patent number 8,059,269
- Issue date Nov 15, 2011
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus, exposure apparatus, and method of manufacturi...
- Patent number 7,936,452
- Issue date May 3, 2011
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G01 - MEASURING TESTING
Information Patent Grant
Particle inspection apparatus, exposure apparatus, and device manuf...
- Patent number 7,760,348
- Issue date Jul 20, 2010
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 7,595,861
- Issue date Sep 29, 2009
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method and apparatus, and semiconductor device manufacture...
- Patent number 6,236,447
- Issue date May 22, 2001
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plane position detecting method and exposing method and exposure ap...
- Patent number 6,163,369
- Issue date Dec 19, 2000
- Canon Kabushiki Kaisha
- Yuichi Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HOLDING DEVICE, HOLDING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE...
- Publication number 20170277039
- Publication date Sep 28, 2017
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
- Publication number 20150338746
- Publication date Nov 26, 2015
- Canon Kabushiki Kaisha
- Takuro Tsujikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FOREIGN SUBSTANCE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND MET...
- Publication number 20110051130
- Publication date Mar 3, 2011
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20100273115
- Publication date Oct 28, 2010
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSPECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20100020316
- Publication date Jan 28, 2010
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUF...
- Publication number 20090207406
- Publication date Aug 20, 2009
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20080218708
- Publication date Sep 11, 2008
- Canon Kabushiki Kaisha
- Atsushi Kawahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Atsushi Kawahara

Person

Patents Grantslast 30 patents

Holding device, holding method, lithography apparatus, and article...

Exposure apparatus, exposure method, and device manufacturing method

Foreign substance inspection apparatus, exposure apparatus, and met...

Particle inspection apparatus, exposure apparatus, and device manuf...

Inspection apparatus, exposure apparatus, and method of manufacturi...

Particle inspection apparatus, exposure apparatus, and device manuf...

Exposure apparatus and method of manufacturing device

Exposure method and apparatus, and semiconductor device manufacture...

Plane position detecting method and exposing method and exposure ap...

Patents Applicationslast 30 patents

HOLDING DEVICE, HOLDING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

FOREIGN SUBSTANCE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND MET...

PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUF...

INSPECTION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURI...

PARTICLE INSPECTION APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUF...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE