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Atsushi Kawano

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  • Atsugi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 5,283,087
    • Issue date Feb 1, 1994
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 5,256,483
    • Issue date Oct 26, 1993
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and method for forming thin films
    • Patent number 5,079,031
    • Issue date Jan 7, 1992
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 5,041,201
    • Issue date Aug 20, 1991
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for forming thin films in quantity
    • Patent number 5,007,374
    • Issue date Apr 16, 1991
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 4,987,004
    • Issue date Jan 22, 1991
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method and apparatus
    • Patent number 4,971,667
    • Issue date Nov 20, 1990
    • Semiconductor Energy Laboratory Co., Ltd.
    • Shunpei Yamazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...