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Atsushi Kobaru
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Ion beam device and cleaning method for gas field ion source
Patent number
10,840,070
Issue date
Nov 17, 2020
HITACHI HIGH-TECH CORPORATION
Yoshimi Kawanami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and image signal processing method
Patent number
8,362,426
Issue date
Jan 29, 2013
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,335,397
Issue date
Dec 18, 2012
Hitachi High-Technologies Corporation
Atsushi Takane
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope having time constant measurement capab...
Patent number
8,274,048
Issue date
Sep 25, 2012
Hitachi High-Technologies Corporation
Akira Ikegami
G01 - MEASURING TESTING
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
8,203,504
Issue date
Jun 19, 2012
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,000,939
Issue date
Aug 16, 2011
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
7,838,840
Issue date
Nov 23, 2010
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
7,817,105
Issue date
Oct 19, 2010
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope having time constant measurement capab...
Patent number
7,763,852
Issue date
Jul 27, 2010
Hitachi High-Technologies Corporation
Akira Ikegami
G01 - MEASURING TESTING
Information
Patent Grant
Method of measurement accuracy improvement by control of pattern sh...
Patent number
7,288,763
Issue date
Oct 30, 2007
Hitachi High-Technologies Corporation
Satoshi Ikeda
G01 - MEASURING TESTING
Information
Patent Grant
Image forming method and charged particle beam apparatus
Patent number
7,187,345
Issue date
Mar 6, 2007
Hitachi High-Technologies Corporation
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measurement accuracy improvement by control of pattern sh...
Patent number
7,045,782
Issue date
May 16, 2006
Hitachi High-Technologies Corporation
Satoshi Ikeda
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus using charged particle beam
Patent number
6,667,483
Issue date
Dec 23, 2003
Hitachi, Ltd.
Atsushi Kobaru
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope
Patent number
5,614,713
Issue date
Mar 25, 1997
Hitachi, Ltd.
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM DEVICE AND CLEANING METHOD FOR GAS FIELD ION SOURCE
Publication number
20200294776
Publication date
Sep 17, 2020
Hitachi High-Technologies Corporation
Yoshimi KAWANAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20110032176
Publication date
Feb 10, 2011
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope Having Time Constant Measurement Capab...
Publication number
20100258723
Publication date
Oct 14, 2010
Hitachi High-Technologies Corporation
Akira IKEGAMI
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE RADIATION APPARATUS
Publication number
20090194692
Publication date
Aug 6, 2009
Atsushi KOBARU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20090001279
Publication date
Jan 1, 2009
Atsushi KOBARU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20080292199
Publication date
Nov 27, 2008
Hitachi High-Technologies Corporation
Atsushi Takane
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20080215260
Publication date
Sep 4, 2008
Hitachi High-Technologies Corporation
Atsushi KOBARU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope Having Time Constant Measurement Capab...
Publication number
20080116375
Publication date
May 22, 2008
Hitachi High-Technologies Corporation
Akira Ikegami
G01 - MEASURING TESTING
Information
Patent Application
Focus adjustment method and focus adjustment apparatus
Publication number
20070200947
Publication date
Aug 30, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Image forming method and charged particle beam apparatus
Publication number
20070159662
Publication date
Jul 12, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning electron microscope and image signal processing method
Publication number
20070064100
Publication date
Mar 22, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE FORMING METHOD AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20070024528
Publication date
Feb 1, 2007
Atsushi Kobaru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of measurement accuracy improvement by control of pattern sh...
Publication number
20060192119
Publication date
Aug 31, 2006
Hitachi High-Technologies Corporation
Satoshi Ikeda
G01 - MEASURING TESTING
Information
Patent Application
Method of measurement accuracy improvement by control of pattern sh...
Publication number
20050161602
Publication date
Jul 28, 2005
Satoshi Ikeda
G01 - MEASURING TESTING
Information
Patent Application
Apparatus using charged particle beam
Publication number
20010050343
Publication date
Dec 13, 2001
Atsushi Kobaru
G01 - MEASURING TESTING