Atsushi Komura

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Obu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrode for semiconductor device and method for manufacturing same
- Patent number 6,348,735
- Issue date Feb 19, 2002
- Nippondenso Co., Lt.
- Tooru Yamaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for semiconductor device including an alloy wiring layer...
- Patent number 6,066,891
- Issue date May 23, 2000
- Nippondenso Co., Ltd.
- Tooru Yamaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching process for semiconductor
- Patent number 5,522,966
- Issue date Jun 4, 1996
- Nippondenso Co., Ltd.
- Atsushi Komura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabrication of semiconductor device
- Patent number 5,480,832
- Issue date Jan 2, 1996
- Nippondenso Co., Ltd.
- Shoji Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching process for semiconductor
- Patent number 5,423,941
- Issue date Jun 13, 1995
- Nippondenso Co., Ltd.
- Atsushi Komura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum line with crystal grains
- Patent number 5,018,001
- Issue date May 21, 1991
- Nippondenso Co., Ltd.
- Kenji Kondo
- H01 - BASIC ELECTRIC ELEMENTS