Atsushi Kubo

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement system, measurement method, and plasma processing device
- Patent number 12,211,676
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Ayuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing workpiece
- Patent number 12,076,879
- Issue date Sep 3, 2024
- Disco Corporation
- Yoshimasa Kojima
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Grant
Plasma processing apparatus
- Patent number 12,046,453
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower plate, lower dielectric member and plasma processing apparatus
- Patent number 12,046,455
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermocompression bonding method for workpiece
- Patent number 11,823,942
- Issue date Nov 21, 2023
- Disco Corporation
- Naoko Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus
- Patent number 11,626,307
- Issue date Apr 11, 2023
- Disco Corporation
- Yoshimasa Kojima
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Processing method and thermocompression bonding method for workpiece
- Patent number 11,222,807
- Issue date Jan 11, 2022
- Disco Corporation
- Naoko Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing wafer
- Patent number 10,262,899
- Issue date Apr 16, 2019
- Disco Corporation
- Xin Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for maintaining coherency between shared-disk and disk ca...
- Patent number 6,591,336
- Issue date Jul 8, 2003
- NEC Corporation
- Atsushi Kubo
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING METHOD
- Publication number 20250087492
- Publication date Mar 13, 2025
- Disco Corporation
- Tomoaki SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
COMMUNICATION SYSTEM, OUTPUT DEVICE, COMMUNICATION METHOD, OUTPUT M...
- Publication number 20240153268
- Publication date May 9, 2024
- NEC Corporation
- Toshihiko FUJISAKI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESSING METHOD FOR WORKPIECE
- Publication number 20230302580
- Publication date Sep 28, 2023
- Disco Corporation
- Yoshimasa KOJIMA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
- Publication number 20230062662
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Ayuta SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING WORKPIECE
- Publication number 20220258369
- Publication date Aug 18, 2022
- Disco Corporation
- Yoshimasa KOJIMA
- B26 - HAND CUTTING TOOLS CUTTING SEVERING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220238311
- Publication date Jul 28, 2022
- Tokyo Electron Limited
- Atsushi KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD FOR CONTROLLING SUBSTRATE PR...
- Publication number 20220230904
- Publication date Jul 21, 2022
- Tokyo Electron Limited
- Atsushi KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM
- Publication number 20220148980
- Publication date May 12, 2022
- Tokyo Electron Limited
- Atsushi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMOCOMPRESSION BONDING METHOD FOR WORKPIECE
- Publication number 20220059392
- Publication date Feb 24, 2022
- Disco Corporation
- Naoko YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20210242061
- Publication date Aug 5, 2021
- Disco Corporation
- Yoshimasa KOJIMA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210082727
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER PLATE, LOWER DIELECTRIC MEMBER AND PLASMA PROCESSING APPARATUS
- Publication number 20210043426
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Satoru Kawakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING WAFER
- Publication number 20170186645
- Publication date Jun 29, 2017
- Disco Corporation
- Xin Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20110017706
- Publication date Jan 27, 2011
- TOKYO ELECTRON LIMITED
- Tetsuro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Redundant memory system and memory controller used therefor
- Publication number 20040168101
- Publication date Aug 26, 2004
- Atsushi Kubo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Technique for maintaining coherency between shared-disk and disk ca...
- Publication number 20020004887
- Publication date Jan 10, 2002
- NEC Corporation
- Atsushi Kubo
- G06 - COMPUTING CALCULATING COUNTING

Atsushi Kubo

Person

Patents Grantslast 30 patents

Substrate processing system and method for controlling substrate pr...

Measurement system, measurement method, and plasma processing device

Method of processing workpiece

Plasma processing apparatus

Shower plate, lower dielectric member and plasma processing apparatus

Thermocompression bonding method for workpiece

Processing apparatus

Processing method and thermocompression bonding method for workpiece

Film forming apparatus and film forming method

Method of processing wafer

Technique for maintaining coherency between shared-disk and disk ca...

Patents Applicationslast 30 patents

PROCESSING METHOD

COMMUNICATION SYSTEM, OUTPUT DEVICE, COMMUNICATION METHOD, OUTPUT M...

PROCESSING METHOD FOR WORKPIECE

MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE

METHOD OF PROCESSING WORKPIECE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND METHOD FOR CONTROLLING SUBSTRATE PR...

FILM FORMING APPARATUS, FILM FORMING METHOD, AND FILM FORMING SYSTEM

THERMOCOMPRESSION BONDING METHOD FOR WORKPIECE

PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

SHOWER PLATE, LOWER DIELECTRIC MEMBER AND PLASMA PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHOD OF PROCESSING WAFER

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Redundant memory system and memory controller used therefor

Technique for maintaining coherency between shared-disk and disk ca...