TREA

Atsushi MATSUMOTO

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PARTICLE SUPPRESSION METHOD
    • Publication number 20230124029
    • Publication date Apr 20, 2023
    • TOKYO ELECTRON LIMITED
    • Kazuki DEMPOH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
    • Publication number 20220356581
    • Publication date Nov 10, 2022
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210010130
    • Publication date Jan 14, 2021
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Method and Film Forming System
    • Publication number 20200258747
    • Publication date Aug 13, 2020
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200098624
    • Publication date Mar 26, 2020
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method of Forming Tungsten Film and Controller
    • Publication number 20190292656
    • Publication date Sep 26, 2019
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLOW RATE CONTROL METHOD, FLOW RATE CONTROL DEVICE, AND FILM FORMIN...
    • Publication number 20190284698
    • Publication date Sep 19, 2019
    • TOKYO ELECTRON LIMITED
    • Kennan MO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method
    • Publication number 20190164768
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING TUNGSTEN FILM
    • Publication number 20180315649
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Koji Maekawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20180312972
    • Publication date Nov 1, 2018
    • TOKYO ELECTRON LIMITED
    • Koji MAEKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...