Atsushi MATSUURA

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Processing apparatus for target object and inspection method for pr...
- Patent number 10,796,889
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Akira Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck device
- Patent number 8,284,538
- Issue date Oct 9, 2012
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 7,619,870
- Issue date Nov 17, 2009
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, electrode unit, feeder member and radi...
- Patent number 7,230,202
- Issue date Jun 12, 2007
- Tokyo Electron Limited
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING APPARATUS FOR TARGET OBJECT AND INSPECTION METHOD FOR PR...
- Publication number 20190027345
- Publication date Jan 24, 2019
- TOKYO ELECTRON LIMITED
- Akira Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TABLE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS
- Publication number 20110192540
- Publication date Aug 11, 2011
- TOKYO ELECTRON LIMITED
- Masakazu Higuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Table for plasma processing apparatus and plasma processing apparatus
- Publication number 20090101284
- Publication date Apr 23, 2009
- TOKYO ELECTRON LIMITED
- Masakazu Higuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20080062610
- Publication date Mar 13, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20080062609
- Publication date Mar 13, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DEVICE
- Publication number 20080062611
- Publication date Mar 13, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage for plasma processing apparatus, and plasma processing apparatus
- Publication number 20080041312
- Publication date Feb 21, 2008
- Shoichiro Matsuyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20080037195
- Publication date Feb 14, 2008
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, electrode unit, feeder member and radi...
- Publication number 20070284085
- Publication date Dec 13, 2007
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus, electrode unit, feeder member and radi...
- Publication number 20050023254
- Publication date Feb 3, 2005
- Daisuke Hayashi
- H01 - BASIC ELECTRIC ELEMENTS

Atsushi MATSUURA

Person

Patents Grantslast 30 patents

Processing apparatus for target object and inspection method for pr...

Electrostatic chuck device

Electrostatic chuck

Plasma processing apparatus, electrode unit, feeder member and radi...

Patents Applicationslast 30 patents

PROCESSING APPARATUS FOR TARGET OBJECT AND INSPECTION METHOD FOR PR...

TABLE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS

Table for plasma processing apparatus and plasma processing apparatus

ELECTROSTATIC CHUCK DEVICE

ELECTROSTATIC CHUCK DEVICE

ELECTROSTATIC CHUCK DEVICE

Stage for plasma processing apparatus, and plasma processing apparatus

ELECTROSTATIC CHUCK

Plasma processing apparatus, electrode unit, feeder member and radi...

Plasma processing apparatus, electrode unit, feeder member and radi...