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Atsushi Muto
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device
Patent number
7,964,845
Issue date
Jun 21, 2011
Hitachi High-Technologies Corporation
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
7,705,302
Issue date
Apr 27, 2010
Hitachi High-Technologies Corporation
Yasuko Aoki
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam device
Patent number
7,456,403
Issue date
Nov 25, 2008
Hitachi High-Technologies Corporation
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
6,963,069
Issue date
Nov 8, 2005
Hitachi High-Technologies Corporation
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Charged particle beam device
Publication number
20090050803
Publication date
Feb 26, 2009
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20080191135
Publication date
Aug 14, 2008
Hitachi High-Technologies Corporation
Yasuko Aoki
G01 - MEASURING TESTING
Information
Patent Application
Charged particle beam device
Publication number
20070235645
Publication date
Oct 11, 2007
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam device
Publication number
20040238752
Publication date
Dec 2, 2004
Yuusuke Tanba
H01 - BASIC ELECTRIC ELEMENTS