Atsushi Muto

Person

  • Hitachinaka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Charged particle beam device

    • Patent number 7,964,845
    • Issue date Jun 21, 2011
    • Hitachi High-Technologies Corporation
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Scanning electron microscope

    • Patent number 7,705,302
    • Issue date Apr 27, 2010
    • Hitachi High-Technologies Corporation
    • Yasuko Aoki
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Charged particle beam device

    • Patent number 7,456,403
    • Issue date Nov 25, 2008
    • Hitachi High-Technologies Corporation
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Charged particle beam device

    • Patent number 6,963,069
    • Issue date Nov 8, 2005
    • Hitachi High-Technologies Corporation
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Charged particle beam device

    • Publication number 20090050803
    • Publication date Feb 26, 2009
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Scanning Electron Microscope

    • Publication number 20080191135
    • Publication date Aug 14, 2008
    • Hitachi High-Technologies Corporation
    • Yasuko Aoki
    • G01 - MEASURING TESTING
  • Information Patent Application

    Charged particle beam device

    • Publication number 20070235645
    • Publication date Oct 11, 2007
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Charged particle beam device

    • Publication number 20040238752
    • Publication date Dec 2, 2004
    • Yuusuke Tanba
    • H01 - BASIC ELECTRIC ELEMENTS