Atsushi Nagato

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Hiratsuka-shi, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR AND APPARATUS FOR MANUFACTURING EPITAXIAL WAFER
- Publication number 20090031954
- Publication date Feb 5, 2009
- Kouichi Nishikido
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and method for depositing layer on substrate
- Publication number 20070281084
- Publication date Dec 6, 2007
- SUMCO TECHXIV CORPORATION
- Atsuhiko Hirosawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...