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Vacuum vapor processing apparatus
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Patent number 8,375,891
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Issue date Feb 19, 2013
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ULVAC, Inc.
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Hiroshi Nagata
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for producing a reflector
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Patent number 8,221,551
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Issue date Jul 17, 2012
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ULVAC, Inc.
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Masayuki Iljima
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Winding type plasma CVD apparatus
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Patent number 7,896,968
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Issue date Mar 1, 2011
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ULVAC, Inc.
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Takayoshi Hirono
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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