Atsushi Obara

Person

  • Fukuoka, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostastic chuck

    • Patent number 5,530,616
    • Issue date Jun 25, 1996
    • Toto Ltd.
    • Tetsuo Kitabayashi
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER