Atsushi Ohta

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Shibata-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate conveyance device and substrate conveyance method, exposu...
- Patent number 9,110,381
- Issue date Aug 18, 2015
- Nikon Corporation
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveyance device and substrate conveyance method, exposu...
- Patent number 9,097,986
- Issue date Aug 4, 2015
- Nikon Corporation
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveyance device and substrate conveyance method, exposu...
- Patent number 8,345,216
- Issue date Jan 1, 2013
- Nikon Corporation
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveyance device and substrate conveyance method, exposu...
- Patent number 8,107,055
- Issue date Jan 31, 2012
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate conveyance device and substrate conveyance method, exposu...
- Patent number 7,995,186
- Issue date Aug 9, 2011
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONVEYANCE DEVICE AND SUBSTRATE CONVEYANCE METHOD, EXPOSU...
- Publication number 20130094006
- Publication date Apr 18, 2013
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate conveyance device and substrate conveyance method, exposu...
- Publication number 20110261330
- Publication date Oct 27, 2011
- Nikon Corporation
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate conveyance device and substrate conveyance method, exposu...
- Publication number 20070296940
- Publication date Dec 27, 2007
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate conveyance device and substrate conveyance method, exposu...
- Publication number 20070110916
- Publication date May 17, 2007
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate conveyance device and substrate conveyance method, exposu...
- Publication number 20060257553
- Publication date Nov 16, 2006
- Zao Nikon Co., Ltd.
- Atsushi Ohta
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY