Atsushi OKITA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device with distance setting between irradiat...
- Patent number 10,879,037
- Issue date Dec 29, 2020
- HITACHI HIGH-TECH CORPORATION
- Natsuki Tsuno
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190051490
- Publication date Feb 14, 2019
- Hitachi High-Technologies Corporation
- Natsuki TSUNO
- H01 - BASIC ELECTRIC ELEMENTS