Atsushi Ookouchi

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,805,958
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,704,730
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid treatment apparatus and substrate liquid treatment...
- Patent number 9,570,327
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Masahiro Fukuda
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus, coating and developing apparatus havi...
- Patent number 8,545,119
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus, resist pattern forming method and storage medium
- Patent number 8,474,396
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Masahiro Fukuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist pattern slimming treatment method
- Patent number 8,455,183
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing device and developing method
- Patent number 8,445,189
- Issue date May 21, 2013
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus and developing method
- Patent number 8,026,048
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing device and developing method
- Patent number 7,918,182
- Issue date Apr 5, 2011
- Tokyo Electronic Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing method, developing apparatus and storage medium
- Patent number 7,896,562
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Development device and development method
- Patent number 7,823,534
- Issue date Nov 2, 2010
- Tokyo Electron Limited
- Atsushi Ookouchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Developing apparatus and method
- Patent number 7,806,076
- Issue date Oct 5, 2010
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heat processing apparatus and heat processing method
- Patent number 7,601,933
- Issue date Oct 13, 2009
- Tokyo Electron Limited
- Kousuke Yoshihara
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,991,385
- Issue date Jan 31, 2006
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for developing processing and apparatus for supplying develo...
- Patent number 6,811,962
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...
- Publication number 20170256427
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...
- Publication number 20150318193
- Publication date Nov 5, 2015
- Tokyo Electron Limited
- Masahiro FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...
- Publication number 20140352737
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, COATING AND DEVELOPING APPARATUS HAVI...
- Publication number 20120014689
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING DEVICE AND DEVELOPING METHOD
- Publication number 20110127236
- Publication date Jun 2, 2011
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, RESIST PATTERN FORMING METHOD AND STORAGE MEDIUM
- Publication number 20110014379
- Publication date Jan 20, 2011
- TOKYO ELECTRON LIMITED
- Masahiro FUKUDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS AND DEVELOPING METHOD
- Publication number 20100330508
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS AND METHOD
- Publication number 20100323307
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291490
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Toyohisa Tsuruda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Resist pattern slimming treatment method
- Publication number 20100291491
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Development device and development method
- Publication number 20090130614
- Publication date May 21, 2009
- TOKYO ELECTRON LIMITED
- Atsushi Ookouchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM
- Publication number 20090035021
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
- Taro YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing device and developing method
- Publication number 20070184178
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heat processing apparatus and heat processing method
- Publication number 20060193986
- Publication date Aug 31, 2006
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing apparatus and method
- Publication number 20060040051
- Publication date Feb 23, 2006
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for developing processing and apparatus for supplying develo...
- Publication number 20050053874
- Publication date Mar 10, 2005
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for developing processing and apparatus for supplying develo...
- Publication number 20030044731
- Publication date Mar 6, 2003
- TOKYO ELECTRON LIMITED
- Kousuke Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Atsushi Ookouchi

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus, substrate cleaning method and non-tra...

Substrate cleaning apparatus, substrate cleaning method and non-tra...

Substrate liquid treatment apparatus and substrate liquid treatment...

Substrate cleaning apparatus, coating and developing apparatus havi...

Developing apparatus, resist pattern forming method and storage medium

Resist pattern slimming treatment method

Developing device and developing method

Developing apparatus and developing method

Developing device and developing method

Developing method, developing apparatus and storage medium

Development device and development method

Developing apparatus and method

Heat processing apparatus and heat processing method

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...

Patents Applicationslast 30 patents

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...

SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...

SUBSTRATE CLEANING APPARATUS, COATING AND DEVELOPING APPARATUS HAVI...

DEVELOPING DEVICE AND DEVELOPING METHOD

DEVELOPING APPARATUS, RESIST PATTERN FORMING METHOD AND STORAGE MEDIUM

DEVELOPING APPARATUS AND DEVELOPING METHOD

DEVELOPING APPARATUS AND METHOD

Resist pattern slimming treatment method

Resist pattern slimming treatment method

Development device and development method

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

Developing device and developing method

Heat processing apparatus and heat processing method

Developing apparatus and method

Method for developing processing and apparatus for supplying develo...

Method for developing processing and apparatus for supplying develo...