Atsushi Rikukawa

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for purging a substrate container
- Patent number 9,305,817
- Issue date Apr 5, 2016
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PURGING A SUBSTRATE CONTAINER
- Publication number 20130213442
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Seiichi KAISE
- H01 - BASIC ELECTRIC ELEMENTS