Atsushi Sekiguchi

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching apparatus
- Patent number 11,195,700
- Issue date Dec 7, 2021
- Canon Anelva Corporation
- Hidekazu Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and device manufacturing method
- Patent number 10,685,815
- Issue date Jun 16, 2020
- Canon Anelva Corporation
- Ryo Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING APPARATUS
- Publication number 20140338836
- Publication date Nov 20, 2014
- Canon ANELVA Corporation
- Hidekazu SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120145671
- Publication date Jun 14, 2012
- Canon ANELVA Corporation
- Ryo Matsuhashi
- H01 - BASIC ELECTRIC ELEMENTS