Atsushi Shibata

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Katsuta, JP

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Patents Grantslast 30 patents

Information Patent Grant
Network management system
- Patent number 7,315,888
- Issue date Jan 1, 2008
- Hitachi, Ltd.
- Atsushi Shibata
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Ion implantation apparatus for semiconductor manufacture
- Patent number 4,839,523
- Issue date Jun 13, 1989
- Hitachi, Ltd.
- Shunroku Taya
- C30 - CRYSTAL GROWTH
Information Patent Grant
Beam scanning control device for ion implantation system
- Patent number 4,494,005
- Issue date Jan 15, 1985
- Hitachi, Ltd.
- Atsushi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant chamber for ion implantation system
- Patent number 4,399,365
- Issue date Aug 16, 1983
- Hitachi, Ltd.
- Takeshi Koike
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for driving rotary member in vacuum
- Patent number 4,383,178
- Issue date May 10, 1983
- Hitachi, Ltd.
- Atsushi Shibata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Network management system
- Publication number 20020133582
- Publication date Sep 19, 2002
- Atsushi Shibata
- H04 - ELECTRIC COMMUNICATION TECHNIQUE