Atsushi Shigenobu

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of obtaining array of plurality of regions on substrate, exp...
- Patent number 12,130,562
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of obtaining array of plurality of shot regions on substrate...
- Patent number 11,947,267
- Issue date Apr 2, 2024
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 11,199,784
- Issue date Dec 14, 2021
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and article manufacturing method
- Patent number 11,061,337
- Issue date Jul 13, 2021
- Canon Kabushiki Kaisha
- Koji Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of calculating amount of fluctuation of imaging characterist...
- Patent number 9,116,444
- Issue date Aug 25, 2015
- Canon Kabushiki Kaisha
- Rika Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system with deformable optical element, exposure...
- Patent number 8,786,822
- Issue date Jul 22, 2014
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Grant
Method of calculating amount of fluctuation of imaging characterist...
- Patent number 8,741,510
- Issue date Jun 3, 2014
- Canon Kabushiki Kaisha
- Rika Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,634,061
- Issue date Jan 21, 2014
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of decreasing fluctuations in optical...
- Patent number 8,564,758
- Issue date Oct 22, 2013
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,643,125
- Issue date Jan 5, 2010
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF OBTAINING ARRAY OF PLURALITY OF SHOT REGIONS ON SUBSTRATE...
- Publication number 20230108056
- Publication date Apr 6, 2023
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF OBTAINING ARRAY OF PLURALITY OF REGIONS ON SUBSTRATE, EXP...
- Publication number 20220269187
- Publication date Aug 25, 2022
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200363734
- Publication date Nov 19, 2020
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200292945
- Publication date Sep 17, 2020
- Canon Kabushiki Kaisha
- Koji Mikami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CALCULATING AMOUNT OF FLUCTUATION OF IMAGING CHARACTERIST...
- Publication number 20140233007
- Publication date Aug 21, 2014
- Canon Kabushiki Kaisha
- Rika Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CALCULATING AMOUNT OF FLUCTUATION OF IMAGING CHARACTERIST...
- Publication number 20130137050
- Publication date May 30, 2013
- Canon Kabushiki Kaisha
- Rika Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100302524
- Publication date Dec 2, 2010
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...
- Publication number 20100214546
- Publication date Aug 26, 2010
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, CALCULATION METHOD, AND DEVICE...
- Publication number 20090225293
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080316443
- Publication date Dec 25, 2008
- Canon Kabushiki Kaisha
- Atsushi Shigenobu
- G02 - OPTICS

Atsushi Shigenobu

Person

Patents Grantslast 30 patents

Method of obtaining array of plurality of regions on substrate, exp...

Method of obtaining array of plurality of shot regions on substrate...

Exposure apparatus and article manufacturing method

Exposure apparatus and article manufacturing method

Method of calculating amount of fluctuation of imaging characterist...

Projection optical system with deformable optical element, exposure...

Method of calculating amount of fluctuation of imaging characterist...

Exposure apparatus and device manufacturing method

Exposure apparatus and method of decreasing fluctuations in optical...

Exposure apparatus and device manufacturing method

Patents Applicationslast 30 patents

METHOD OF OBTAINING ARRAY OF PLURALITY OF SHOT REGIONS ON SUBSTRATE...

METHOD OF OBTAINING ARRAY OF PLURALITY OF REGIONS ON SUBSTRATE, EXP...

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD

METHOD OF CALCULATING AMOUNT OF FLUCTUATION OF IMAGING CHARACTERIST...

METHOD OF CALCULATING AMOUNT OF FLUCTUATION OF IMAGING CHARACTERIST...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...

EXPOSURE APPARATUS, EXPOSURE METHOD, CALCULATION METHOD, AND DEVICE...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD