Atsushi Shimoda

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
- Patent number 9,011,065
- Issue date Apr 21, 2015
- Hitachi High-Technologies Corporation
- Susumu Tauchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 8,451,439
- Issue date May 28, 2013
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 8,253,934
- Issue date Aug 28, 2012
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 8,149,395
- Issue date Apr 3, 2012
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 7,911,601
- Issue date Mar 22, 2011
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,903,249
- Issue date Mar 8, 2011
- Hitachi, Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 7,646,477
- Issue date Jan 12, 2010
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,489,395
- Issue date Feb 10, 2009
- Hitachi High-Technologies Corporation, Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 7,446,866
- Issue date Nov 4, 2008
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method for analyzing circuit pattern defects and a system thereof
- Patent number 7,352,890
- Issue date Apr 1, 2008
- Hitachi, Ltd.
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image detection method and its apparatus and defect detection metho...
- Patent number 7,127,098
- Issue date Oct 24, 2006
- Hitachi, Ltd.
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 7,110,105
- Issue date Sep 19, 2006
- Hitachi Ltd.
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 7,081,953
- Issue date Jul 25, 2006
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for analyzing circuit pattern defects
- Patent number 7,062,081
- Issue date Jun 13, 2006
- Hitachi, Ltd.
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects
- Patent number 6,927,847
- Issue date Aug 9, 2005
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern formed on a substrate
- Patent number 6,900,888
- Issue date May 31, 2005
- Hitachi High-Technologies Corporation
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting pattern
- Patent number 6,831,737
- Issue date Dec 14, 2004
- Hitachi, Ltd.
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Grant
Method for observing specimen and device therefor
- Patent number 6,756,589
- Issue date Jun 29, 2004
- Hitachi, Ltd.
- Kenji Obara
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects of a specimen
- Patent number 6,721,047
- Issue date Apr 13, 2004
- Hitachi, Ltd.
- Atsushi Shimoda
- G01 - MEASURING TESTING
Information Patent Grant
Method of determining lethality of defects in circuit pattern inspe...
- Patent number 6,556,955
- Issue date Apr 29, 2003
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope having magnification switching control
- Patent number 6,476,388
- Issue date Nov 5, 2002
- Hitachi, Ltd.
- Ryo Nakagaki
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for processing inspection data
- Patent number 6,456,951
- Issue date Sep 24, 2002
- Hitachi, Ltd.
- Shunji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining lethality of defects in circuit pattern inspe...
- Patent number 6,334,097
- Issue date Dec 25, 2001
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20150194327
- Publication date Jul 9, 2015
- Hitachi High-Technologies Corporation
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOGISTICS DESIGNING DEVICE, METHOD AND PROGRAM
- Publication number 20140297552
- Publication date Oct 2, 2014
- Hitachi, Ltd
- Junko Hosoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-BASE INVENTORY DEPLOYMENT COMPUTATION DEVICE
- Publication number 20140172494
- Publication date Jun 19, 2014
- Junko Hosoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20120176602
- Publication date Jul 12, 2012
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING PATTERN
- Publication number 20110170092
- Publication date Jul 14, 2011
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20110110752
- Publication date May 12, 2011
- Hitachi High-Technologies Corporation
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...
- Publication number 20110110751
- Publication date May 12, 2011
- Susumu TAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method And Apparatus For Inspecting A Pattern Formed On A Substrate
- Publication number 20100104173
- Publication date Apr 29, 2010
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Method And Apparatus For Inspecting Pattern Defects
- Publication number 20090153840
- Publication date Jun 18, 2009
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Apparatus And Method For Inspecting Pattern
- Publication number 20090066943
- Publication date Mar 12, 2009
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Design Support Device, Program and Design Support Method
- Publication number 20070299640
- Publication date Dec 27, 2007
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20070002318
- Publication date Jan 4, 2007
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspecting pattern
- Publication number 20060256328
- Publication date Nov 16, 2006
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Method for analyzing circuit pattern defects and a system thereof
- Publication number 20060140472
- Publication date Jun 29, 2006
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Renewal proposal support system
- Publication number 20060085278
- Publication date Apr 20, 2006
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20050264800
- Publication date Dec 1, 2005
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting a pattern formed on a substrate
- Publication number 20050206888
- Publication date Sep 22, 2005
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspecting pattern
- Publication number 20050062961
- Publication date Mar 24, 2005
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting a pattern formed on a substrate
- Publication number 20040124363
- Publication date Jul 1, 2004
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Image detection method and its apparatus and defect detection metho...
- Publication number 20030053676
- Publication date Mar 20, 2003
- Atsushi Shimoda
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting pattern defects
- Publication number 20030048439
- Publication date Mar 13, 2003
- Minoru Yoshida
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for inspecting pattern
- Publication number 20030020904
- Publication date Jan 30, 2003
- Sachio Uto
- G01 - MEASURING TESTING
Information Patent Application
Method of determining lethality of defects in circuit pattern inspe...
- Publication number 20020042682
- Publication date Apr 11, 2002
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting defects of a specimen
- Publication number 20020036769
- Publication date Mar 28, 2002
- Hitachi, Ltd
- Atsushi Shimoda
- G01 - MEASURING TESTING
Information Patent Application
Method for analyzing circuit pattern defects and a system thereof
- Publication number 20010016061
- Publication date Aug 23, 2001
- Atsushi Shimoda
- G06 - COMPUTING CALCULATING COUNTING

Atsushi Shimoda

Person

Patents Grantslast 30 patents

Vacuum processing apparatus and operating method of vacuum processi...

Apparatus and method for inspecting pattern

Method and apparatus for inspecting a pattern formed on a substrate

Apparatus and method for inspecting pattern

Apparatus and method for inspecting pattern

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting a pattern formed on a substrate

Method and apparatus for inspecting pattern defects

Apparatus and method for inspecting pattern

Method for analyzing circuit pattern defects and a system thereof

Image detection method and its apparatus and defect detection metho...

Method and apparatus for inspecting pattern defects

Apparatus and method for inspecting pattern

Method and system for analyzing circuit pattern defects

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting a pattern formed on a substrate

Apparatus and method for inspecting pattern

Method for observing specimen and device therefor

Method and apparatus for inspecting defects of a specimen

Method of determining lethality of defects in circuit pattern inspe...

Scanning electron microscope having magnification switching control

Method and apparatus for processing inspection data

Method of determining lethality of defects in circuit pattern inspe...

Patents Applicationslast 30 patents

VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...

LOGISTICS DESIGNING DEVICE, METHOD AND PROGRAM

MULTI-BASE INVENTORY DEPLOYMENT COMPUTATION DEVICE

APPARATUS AND METHOD FOR INSPECTING PATTERN

APPARATUS AND METHOD FOR INSPECTING PATTERN

VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...

VACUUM PROCESSING SYSTEM AND VACUUM PROCESSING METHOD OF SEMICONDUC...

Method And Apparatus For Inspecting A Pattern Formed On A Substrate

Method And Apparatus For Inspecting Pattern Defects

Apparatus And Method For Inspecting Pattern

Design Support Device, Program and Design Support Method

Method and apparatus for inspecting pattern defects

Apparatus and method for inspecting pattern

Method for analyzing circuit pattern defects and a system thereof

Renewal proposal support system

Method and apparatus for inspecting pattern defects

Method and apparatus for inspecting a pattern formed on a substrate

Apparatus and method for inspecting pattern

Method and apparatus for inspecting a pattern formed on a substrate

Image detection method and its apparatus and defect detection metho...

Method and apparatus for inspecting pattern defects

Apparatus and method for inspecting pattern

Method of determining lethality of defects in circuit pattern inspe...

Method and apparatus for inspecting defects of a specimen

Method for analyzing circuit pattern defects and a system thereof