Atsushi SUNAHARA

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Osaka-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Patent number 7,521,702
- Issue date Apr 21, 2009
- Osaka University
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
- Publication number 20240094646
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- Katsunobu NISHIHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
- Publication number 20170127505
- Publication date May 4, 2017
- Institute for Laser Technology
- Atsushi SUNAHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
- Publication number 20120241649
- Publication date Sep 27, 2012
- OSAKA UNIVERSITY
- Katsunobu NISHIHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source and extreme ultraviolet light sour...
- Publication number 20060133574
- Publication date Jun 22, 2006
- Kansai Technology Licensing Organization Co., Ltd.
- Keiji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR