Atsushi Tajika

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Niigata-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Phase shift mask blank, phase shift mask, and method of manufacture
- Patent number 7,179,567
- Issue date Feb 20, 2007
- Shin-Etsu Chemical Co., Ltd.
- Yukio Inazuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Phase shift mask blank, phase shift mask, and method of manufacture
- Publication number 20030235767
- Publication date Dec 25, 2003
- Shin-Etsu Chemical Co., Ltd.
- Yukio Inazuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase shift mask blank, phase shift mask, and method of manufacture
- Publication number 20030025216
- Publication date Feb 6, 2003
- Yukio Inazuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY