Atsushi TAJIMA

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pellicle inspection apparatus
- Patent number 9,588,421
- Issue date Mar 7, 2017
- Lasertec Corporation
- Kiwamu Takehisa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PELLICLE INSPECTION APPARATUS
- Publication number 20150293460
- Publication date Oct 15, 2015
- Lasertec Corporation
- Kiwamu TAKEHISA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY