Atsushi Takane

Person

Katsuta, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and method utilizing multiple inspectio...
- Patent number 8,558,999
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Koji Kawaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,335,397
- Issue date Dec 18, 2012
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam equipment and charged particle microscopy
- Patent number 8,304,722
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,263,935
- Issue date Sep 11, 2012
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Pattern matching apparatus and scanning electron microscope using t...
- Patent number 8,041,104
- Issue date Oct 18, 2011
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and dimension measuring method
- Patent number 8,030,614
- Issue date Oct 4, 2011
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for charged particle bea...
- Patent number 8,026,491
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Takeshi Ogashiwa
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and dimension measuring method
- Patent number 7,973,282
- Issue date Jul 5, 2011
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam equipment
- Patent number 7,923,701
- Issue date Apr 12, 2011
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,805,023
- Issue date Sep 28, 2010
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,800,059
- Issue date Sep 21, 2010
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,652,249
- Issue date Jan 26, 2010
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,642,514
- Issue date Jan 5, 2010
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,633,063
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam alignment method and charged particle beam ap...
- Patent number 7,605,381
- Issue date Oct 20, 2009
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with DF-STEM image valuation method
- Patent number 7,459,683
- Issue date Dec 2, 2008
- Hitachi High-Technologies Corporation
- Mine Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam equipment and charged particle microscopy
- Patent number 7,435,957
- Issue date Oct 14, 2008
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring line and space pattern using scanning electron...
- Patent number 7,433,542
- Issue date Oct 7, 2008
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam equipment
- Patent number 7,375,330
- Issue date May 20, 2008
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle system and a method for measuring image magnification
- Patent number 7,372,047
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,361,894
- Issue date Apr 22, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,340,111
- Issue date Mar 4, 2008
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,329,868
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor inspection system
- Patent number 7,235,782
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,236,651
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and dimension measuring method
- Patent number 7,214,936
- Issue date May 8, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining depression/protrusion of sample and charged...
- Patent number 7,166,840
- Issue date Jan 23, 2007
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a sample image and charged particle beam apparatus
- Patent number 7,164,126
- Issue date Jan 16, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,109,485
- Issue date Sep 19, 2006
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Shape measuring device and shape measuring method
- Patent number 7,078,688
- Issue date Jul 18, 2006
- Hitachi High-Technologies Corporation
- Masato Kazui
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100102224
- Publication date Apr 29, 2010
- Hitachi High-Technologies Corporation
- Atsushi TAKANE
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...
- Publication number 20100006755
- Publication date Jan 14, 2010
- Mitsugo Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD
- Publication number 20090314938
- Publication date Dec 24, 2009
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam equipment
- Publication number 20090242794
- Publication date Oct 1, 2009
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY
- Publication number 20090084955
- Publication date Apr 2, 2009
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20080292199
- Publication date Nov 27, 2008
- Hitachi High-Technologies Corporation
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and method for inspecting defects
- Publication number 20080239292
- Publication date Oct 2, 2008
- Hitachi High-Technologies Corporation
- Koji Kawaki
- G01 - MEASURING TESTING
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20080217535
- Publication date Sep 11, 2008
- Mitsugu Sato
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080116376
- Publication date May 22, 2008
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus and dimension measuring method
- Publication number 20080100832
- Publication date May 1, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080073526
- Publication date Mar 27, 2008
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus and method for charged particle bea...
- Publication number 20070284542
- Publication date Dec 13, 2007
- Takeshi Ogashiwa
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20070280559
- Publication date Dec 6, 2007
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor inspection system
- Publication number 20070194236
- Publication date Aug 23, 2007
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20070120065
- Publication date May 31, 2007
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam device with DF-STEM image valuation method
- Publication number 20070085007
- Publication date Apr 19, 2007
- Hitachi High-Technologies Corporation
- Mine Araki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a sample image and charged particle beam apparatus
- Publication number 20070029478
- Publication date Feb 8, 2007
- Mitsugu Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20070023657
- Publication date Feb 1, 2007
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus, method of displaying sample image,...
- Publication number 20060219907
- Publication date Oct 5, 2006
- Takeshi Ogashiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam equipment
- Publication number 20060219908
- Publication date Oct 5, 2006
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam equipment and charged particle microscopy
- Publication number 20060151697
- Publication date Jul 13, 2006
- Hitachi High-Technologies Corporation
- Hiromi Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and dimension measuring method
- Publication number 20060071166
- Publication date Apr 6, 2006
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern matching apparatus and scanning electron microscope using t...
- Publication number 20060045326
- Publication date Mar 2, 2006
- Hitachi High-Technologies Corporation
- Yasutaka Toyoda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for measuring line and space pattern using scanning electron...
- Publication number 20050207673
- Publication date Sep 22, 2005
- Atsushi Takane
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20050199811
- Publication date Sep 15, 2005
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle system and a method for measuring image magnification
- Publication number 20050189501
- Publication date Sep 1, 2005
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20050184237
- Publication date Aug 25, 2005
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for determining depression/protrusion of sample and charged...
- Publication number 20050151078
- Publication date Jul 14, 2005
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shape measuring device and shape measuring method
- Publication number 20050061973
- Publication date Mar 24, 2005
- Masato Kazui
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope and sample observing method using it
- Publication number 20040188611
- Publication date Sep 30, 2004
- Shuichi Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS

Atsushi Takane

Person

Patents Grantslast 30 patents

Defect inspection apparatus and method utilizing multiple inspectio...

Charged particle beam apparatus

Charged particle beam equipment and charged particle microscopy

Charged particle beam apparatus

Pattern matching apparatus and scanning electron microscope using t...

Charged particle beam apparatus and dimension measuring method

Charged particle beam apparatus and method for charged particle bea...

Charged particle beam apparatus and dimension measuring method

Charged particle beam equipment

Image evaluation method and microscope

Method of forming a sample image and charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam alignment method and charged particle beam ap...

Charged particle beam device with DF-STEM image valuation method

Charged particle beam equipment and charged particle microscopy

Method for measuring line and space pattern using scanning electron...

Charged particle beam equipment

Charged particle system and a method for measuring image magnification

Method of forming a sample image and charged particle beam apparatus

Image evaluation method and microscope

Charged particle beam apparatus

Semiconductor inspection system

Image evaluation method and microscope

Charged particle beam apparatus and dimension measuring method

Method for determining depression/protrusion of sample and charged...

Method of forming a sample image and charged particle beam apparatus

Charged particle beam apparatus

Shape measuring device and shape measuring method

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM ALIGNMENT METHOD AND CHARGED PARTICLE BEAM AP...

CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD

Charged particle beam equipment

CHARGED PARTICLE BEAM EQUIPMENT AND CHARGED PARTICLE MICROSCOPY

Charged Particle Beam Apparatus

Apparatus and method for inspecting defects

Method of forming a sample image and charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus and dimension measuring method

Charged particle beam apparatus

Charged particle beam apparatus and method for charged particle bea...

Image evaluation method and microscope

Semiconductor inspection system

Charged particle beam apparatus

Charged particle beam device with DF-STEM image valuation method

Method of forming a sample image and charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus, method of displaying sample image,...

Charged particle beam equipment

Charged particle beam equipment and charged particle microscopy

Charged particle beam apparatus and dimension measuring method

Pattern matching apparatus and scanning electron microscope using t...

Method for measuring line and space pattern using scanning electron...

Image evaluation method and microscope

Charged particle system and a method for measuring image magnification

Charged particle beam apparatus

Method for determining depression/protrusion of sample and charged...

Shape measuring device and shape measuring method

Scanning electron microscope and sample observing method using it