Atsushi TAKEUCHI

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Patents Grantslast 30 patents

Information Patent Grant
Film forming position misalignment correction method and film formi...
- Patent number 12,180,580
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,894,222
- Issue date Feb 6, 2024
- Tokyo Electron Limited
- Atsushi Takeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING POSITION MISALIGNMENT CORRECTION METHOD AND FILM FORMI...
- Publication number 20240011148
- Publication date Jan 11, 2024
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210407779
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Atsushi TAKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS