Atsushi Tamada

Follow

Person

Hazukashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for heat-treating wafers
- Patent number 4,849,608
- Issue date Jul 18, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Yusuke Muraoka
- C30 - CRYSTAL GROWTH