Atsushi TANAKA

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Nirasaki City, Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Inner wall and substrate processing apparatus
- Patent number 12,040,198
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Yuji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate placing table
- Patent number 11,171,033
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Atsushi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate placing table
- Patent number 10,283,398
- Issue date May 7, 2019
- Tokyo Electron Limited
- Atsushi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Inner Wall and substrate Processing Apparatus
- Publication number 20240321602
- Publication date Sep 26, 2024
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200344850
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi YAMAGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Inner Wall and substrate Processing Apparatus
- Publication number 20200203194
- Publication date Jun 25, 2020
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLACING TABLE
- Publication number 20190229009
- Publication date Jul 25, 2019
- TOKYO ELECTRON LIMITED
- Atsushi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PLACING TABLE
- Publication number 20170352576
- Publication date Dec 7, 2017
- TOKYO ELECTRON LIMITED
- Atsushi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS