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Atsushi Tokuno
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Tokyo, JP
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last 30 patents
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Patent Grant
Exposure apparatus
Patent number
9,799,489
Issue date
Oct 24, 2017
Advantest Corp.
Shinichi Hamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
EXPOSURE APPARATUS
Publication number
20170229285
Publication date
Aug 10, 2017
Advantest Corporation
Shinichi Hamaguchi
H01 - BASIC ELECTRIC ELEMENTS