TREA

Atsushi Tsuchiya

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  • Hitachi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Microwave plasma processing apparatus
    • Patent number 5,449,411
    • Issue date Sep 12, 1995
    • Hitachi, Ltd.
    • Takuya Fukuda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...