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Atsushi Ueda
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Oyama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,789,374
Issue date
Oct 17, 2023
Gigaphoton Inc.
Yusuke Hoshino
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chamber device, extreme ultraviolet light generation apparatus, and...
Patent number
11,483,917
Issue date
Oct 25, 2022
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,366,394
Issue date
Jun 21, 2022
Gigaphoton Inc.
Koichiro Koge
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus, extreme ultraviolet...
Patent number
11,363,705
Issue date
Jun 14, 2022
Gigaphoton Inc.
Takayuki Osanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation apparatus, and electronic devi...
Patent number
11,350,514
Issue date
May 31, 2022
Gigaphoton Inc.
Koichiro Koge
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,272,608
Issue date
Mar 8, 2022
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus and extreme ultravio...
Patent number
11,211,239
Issue date
Dec 28, 2021
Gigaphoton Inc.
Atsushi Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...
Patent number
11,145,429
Issue date
Oct 12, 2021
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
Patent number
11,036,143
Issue date
Jun 15, 2021
Gigaphoton Inc.
Atsushi Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
10,990,016
Issue date
Apr 27, 2021
Gigaphoton Inc.
Atsushi Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,582,602
Issue date
Mar 3, 2020
Gigaphoton Inc.
Atsushi Ueda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generating device
Patent number
10,268,119
Issue date
Apr 23, 2019
Gigaphoton Inc.
Shinji Nagai
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Information
Patent Grant
Extreme ultraviolet light generation apparatus and method of design...
Patent number
10,001,706
Issue date
Jun 19, 2018
Gigaphoton Inc.
Atsushi Ueda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation device
Patent number
9,872,372
Issue date
Jan 16, 2018
Gigaphoton Inc.
Atsushi Ueda
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus with a gas supply to...
Patent number
9,661,730
Issue date
May 23, 2017
Gigaphoton, Inc.
Atsushi Ueda
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
Publication number
20240422889
Publication date
Dec 19, 2024
Gigaphoton Inc.
Takayuki SUZUKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
Publication number
20240241448
Publication date
Jul 18, 2024
Gigaphoton Inc.
Atsushi UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
Publication number
20240196505
Publication date
Jun 13, 2024
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20230269857
Publication date
Aug 24, 2023
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
TARGET SUPPLY SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATU...
Publication number
20230266677
Publication date
Aug 24, 2023
Gigaphoton Inc.
Fumio IWAMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220146943
Publication date
May 12, 2022
Gigaphoton Inc.
Koichiro KOGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20220082927
Publication date
Mar 17, 2022
Gigaphoton Inc.
Yusuke HOSHINO
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND ELECTRONIC DEVI...
Publication number
20210307150
Publication date
Sep 30, 2021
Gigaphoton Inc.
Koichiro KOGE
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, EXTREME ULTRAVIOLET...
Publication number
20210298160
Publication date
Sep 23, 2021
Gigaphoton Inc.
Takayuki OSANAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AND...
Publication number
20210289611
Publication date
Sep 16, 2021
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20210235571
Publication date
Jul 29, 2021
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GE...
Publication number
20200312479
Publication date
Oct 1, 2020
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
Publication number
20200241425
Publication date
Jul 30, 2020
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIO...
Publication number
20200185212
Publication date
Jun 11, 2020
Gigaphoton Inc.
Atsushi UEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20200041909
Publication date
Feb 6, 2020
Gigaphoton Inc.
Atsushi UEDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20190364654
Publication date
Nov 28, 2019
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING DEVICE
Publication number
20180224748
Publication date
Aug 9, 2018
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND METHOD OF DESIGN...
Publication number
20170315446
Publication date
Nov 2, 2017
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Publication number
20170094767
Publication date
Mar 30, 2017
Gigaphoton Inc.
Atsushi UEDA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20160255707
Publication date
Sep 1, 2016
Gigaphoton Inc.
Atsushi UEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR